The principal needs of realization on strategic inertial accelerometer are large measurement range ( higher than 70g ) and high stability . in this paper aimed at a most basic and typical " sandwich " structure with easy realization in techniques , the system of micromachined electrostatic servo - accelerometer is analyzed in detail on static and dynamic state , mainly including : the influence on the z - component of the center of mass , lateral accelerations disturbance and the applied bias voltage on the stability of the sensor 戰(zhàn)略慣導(dǎo)加速度計實用化的首要條件是大量程( 70g以上)和高穩(wěn)定性,本文針對一種最基本、最為典型和工藝上較易實現(xiàn)的“三明治”結(jié)構(gòu),從靜態(tài)和動態(tài)兩方面對電容式微機械靜電伺服加速度計系統(tǒng)進行了詳細分析。